Main Authors Kovalchuk A.V.
Kovalchuk A.V.

Institute of Microelectronics Technology and High-Purity Materials of the Russian Academy of Sciences

Chernogolovka, Moscow region, Russian Federation

Kovalchuk A.V.

A.V. Kovalchuk (b. 1961) graduated from the Moscow Physics and Technology Institute in 1988. Senior researcher of the Institute for Problems of Microelectronics Technology and High-pure Materials of RAS. Author of 42 publications in the field of plasma physics and photochemistry.

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