Nickel-Dopant Atom Clusters and their Effect on the Recombination Properties of Silicon
Authors: Zaynabidinov S.Z., Kurbanov A.O. | Published: 16.04.2019 |
Published in issue: #2(83)/2019 | |
DOI: 10.18698/1812-3368-2019-2-81-93 | |
Category: Physics | Chapter: Condensed Matter Physics | |
Keywords: silicon, nickel, oxygen, cluster, complex, lifetime, recombination properties |
The investigation determined the types and nature of structural defects in n-type silicon featuring nickel-dopant atom clusters by using deep-level transient spectroscopy (DLTS) and measuring specific resistance, concentration and lifetime of charge carriers. The investigation employed the Solver-NEXT infrared and atomic-force microscopes. We observed that after high-temperature diffusion star-like defects appear in those Si samples that were cooled slowly. Rapid cooling of Si samples yields no decorating of dislocations, which is linked to formation of [Ni-O]-type point defects, [Ni-Si] silicides and Ni[Nis-Nii] atom pairs (unlike in the case of slowly cooled doped Si samples). The differences in shape and size of the defects forming in slowly and rapidly cooled Si samples may be explained as follows: in the case of slow cooling, as the system transitions into the equilibrium state, its free energy decreases, and nickel atoms gradually precipitating at the defects of the crystal lattice form inclusions characterised by the most energetically favourable state, that is, star-like defects. We detected an increase in charge carrier lifetime caused by formation of a trapping level connected to the [Ni-O] complex in silicon
References
[1] Fistul V.I. Atomy legiruyushchikh primesey v poluprovodnikakh [Atoms of alloying impurities in semiconductors]. Moscow, Fizmatlit Publ., 2004.
[2] Silva D.J., Wahl U., Correia J.G., et al. Drawing the geometry of 3d transition metal-boron pairs in silicon from electron emission channeling experiments. Nucl. Instrum. Instrum. Methods Phys. Res. B., 2016, vol. 371, pp. 59–62. DOI: 10.1016/j.nimb.2015.09.051
[3] Vyvenko O.F., Buonassisi T., Istratov A.A. X-ray beam induced current — a synchrotron radiation based technique for the in situ analysis of recombination properties and chemical nature of metal clusters in silicon. J. Appl. Phys., 2002, vol. 91, iss. 6, pp. 3614–3617. DOI: 10.1063/1.1450026
[4] Riedel F., Schroter W. Electrical and structural properties of nanoscale NiSi2 precipitates in silicon. Phys. Rev. B, 2000, vol. 62, iss. 11, pp. 7150–7156. DOI: 10.1103/PhysRevB.62.7150
[5] Abdurakhmanov B.A., Bakhadirkhanov M.K., Ayupov K.S. Formation of clusters of impurity atoms of nickel in silicon and controlling their parameters. Nanosci. Nanotechnol., 2014, vol. 4, no. 2, pp. 23–26.
[6] Schroter W., Hedemann H., Kveder V., et al. Measurements of energy spectra of extended defects. J. Phys.: Condens. Matter., 2002, vol. 14, no. 48, pp. 13047–13059. DOI: 10.1088/0953-8984/14/48/350
[7] Lozovoy K.A. Kinetika formirovaniya nanogeterostruktur s kvantovymi tochkami germaniya na kremnii dlya priborov optoelektroniki. Dis. kand. fiz.-mat. nauk [Kinetics of nanoheterostructures formation with quantum dots of germanium on silicon for optoelectronics devices. Cand. Phys.-Math. Sci. Diss.]. Tomsk, TSU Publ., 2016 (in Russ.).
[8] Istratov A.A., Weber E.R. Electrical properties and recombination activity of copper, nickel and cobalt in silicon. Appl. Phys. A, 1998, vol. 66, iss. 2, pp. 123–136. DOI: 10.1007/s003390050649
[9] Makhkamov Sh., Karimov M., Kurbanov A.O., et al. On the thermostability of electrical properties of p--Si
and p--Si
. Russ. Phys. J., 2005, vol. 48, iss. 12, pp. 1298–1301. DOI: 10.1007/s11182-006-0061-5
[10] Tanaka S., Ikari T., Kitagawa H. In-diffusion and annealing processes of substitutional nickel atoms in dislocation-free silicon. Jpn. J. Appl. Phys., 2001, vol. 40, part 1, no. 5A, pp. 3063–3068. DOI: 10.1143/JJAP.40.3063