Main Authors Shapoval S.Yu.
Shapoval S.Yu.

Institute of Microelectronics Technology and High-Purity Materials of the Russian Academy of Sciences

Chernogolovka, Moscow region, Russian Federation

Shapoval S.Yu.

S.Yu. Shapoval (b. 1949) graduated from the Moscow Institute for Radio-Engineering Electronics and Automatics in 1975. Ph. D. (Eng.), head of "Epitaxial Micro- and Nanostructures" laboratory of the Institute for Problems of Microelectronics Technology and High-pure Materials of RAS. Author of more than 100 publications in the field of nanoelectronics, plasma physics and epitaxy.

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