X-ray Diffraction and Electron Microscopic Studies of the ZnO(S) Metal Oxide Films Obtained by the Ultrasonic Spray Pyrolysis Method

Abstract

Samples of thin ZnO(S) films with thickness of approximately 400 nm deposited on a silicon substrate by the ultrasonic spray pyrolysis were obtained. The films had crystallographic orientation (001) with the lattice parameters a = b = 0.3265 nm and c = 0.5212 nm. The ZnO_1--xS_x nanocrystallites on the film surface had characteristic sizes in the range of 50--200 nm. The nanocrystallites lattice parameter was experimentally determined: 0.7598 nm. A decrease in the ZnO film lattice parameters and the geometric dimensions of nanocrystallites on the film surface exposed to γ-irradiation was established. It was determined that the nanocrystals crystalline structure corresponded to the cubic lattice and belonged to the F43m space group with the lattice parameter of 0.7692 nm. According to the scanning electron microscopy, the nanocrystallites diameter was 50--200 nm, the nanocrystallites were growing perpendicular to the substrate along the z-axis with crystallographic orientation (111). It was established that the influence of γ-irradiation with a dose of 5 · 10⁶ rad was making it possible to reduce the nanocrystallites size and led to alteration in their density and geometric shape

The work was supported by the Ministry of Innovative Development of the Republic of Uzbekistan (grant no. FZ- 292154210)

Please cite this article in English as:

Zaynabidinov S.Z., Yuldashev Sh.U., Boboev A.Y., et al. X-ray diffraction and electron microscopic studies of the ZnO(S) metal oxide films obtained by the ultrasonic spray pyrolysis method. Herald of the Bauman Moscow State Technical University, Series Natural Sciences, 2024, no. 1 (112), pp. 78--92 (in Russ.). EDN: GFUKHQ

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