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Shape Control of the Technological Ion Source Beam for High-Precision Surface Treatment
| Authors: Dukhopel’nikov D.V., Vorob’ev E.V., Ivakhnenko S.G., Kirillov D.V. | Published: 24.05.2017 |
| Published in issue: #3(72)/2017 | |
| DOI: 10.18698/1812-3368-2017-3-24-36 | |
| Category: Mathematics and Mechanics | Chapter: Mechanics of Liquid, Gas and Plasma | |
| Keywords: accelerator with anode layer, Hall current accelerator, ion beam focusing, ion sputtering, anode layer, Lorentz force | |