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Magnetron Discharge with Liquid-Phase Cathode
| Authors: Dukhopel’nikov D.V., Bulychev V.S., Vorob’ev E.V. | Published: 26.01.2018 |
| Published in issue: #1(76)/2018 | |
| DOI: 10.18698/1812-3368-2018-1-95-103 | |
| Category: Physics | Chapter: Thermal Physics and Theoretical Heat Engineering | |
| Keywords: cathode sputtering yield, magnetron discharge, self-sputtering mode, liquid phase sputtering, phase transition | |