Д.В. Духопельников, Е.В. Воробьев, С.Г. Ивахненко
36
ISSN 1812-3368. Вестник МГТУ им. Н.Э. Баумана. Сер. Естественные науки. 2017. № 3
[15] Dukhopel'nikov D.V., Ivakhnenko S.G. Influence of azimuthal deflection of ions on the
beam shape of the engine with anode layer.
Nauka i obrazovanie: nauchnoe izdanie MGTU
im. N.E. Baumana
[Science and Education: Scientific Publication of BMSTU], 2012, no. 10
(in Russ.). DOI: 10.7463/1012.0483832
Available at:
http://technomag.bmstu.ru/en/doc/483832.html[16] Matthew T. Domonkos, Alec D. Gallimore, Sven G. Bilén. A Hall probe diagnostic for
low density plasma accelerators.
Rev. Sci. Instrum
., 1998, vol. 69, no. 6, pp. 2546–2549.
DOI: 10.1063/1.1148956 Available at:
http://aip.scitation.org/doi/10.1063/1.1148956[17] Dukhopel'nikov D.V. Measurement of magnetic field and Hall current modeling in
discharge of magnetron sputtering system.
Nauka i obrazovanie: nauchnoe izdanie MGTU
im. N.E. Baumana
[Science and Education: Scientific Publication of BMSTU], 2015, no. 10
(in Russ.). DOI: 10.7463/1015.0818660
Available at:
http://technomag.bmstu.ru/en/doc/818660.html[18]
Rossnagel S.M., Kaufman H.R. Induced drift currents in circular planar magnetrons.
Journal of Vacuum Science
&
Technology A: Vacuum Surfaces and Films
, 1987, vol. 5, no. 1,
pp. 88–91. DOI: 10.1116/1.574822 Available at:
http://avs.scitation.org/doi/10.1116/1.574822Dukhopel'nikov D.V.
— Cand. Sc. (Eng.), Assoc. Professor of Plasma Power Facilities
Department, Bauman Moscow State Technical University (2-ya Baumanskaya ul. 5, str. 1,
Moscow, 105005 Russian Federation).
Vorob'ev E.V.
— assistant of Plasma Power Facilities Department, Bauman Moscow State
Technical University (2-ya Baumanskaya ul. 5, str. 1, Moscow, 105005 Russian Federation).
Ivakhnenko S.G.
— Cand. Sc. (Eng.), Assoc. Professor of Plasma Power Facilities Department,
Bauman Moscow State Technical University (2-ya Baumanskaya ul. 5, str. 1, Moscow, 105005
Russian Federation).
Kirillov D.V.
— assistant of Plasma Power Facilities Department, Bauman Moscow State
Technical University (2-ya Baumanskaya ul. 5, str. 1, Moscow, 105005 Russian Federation).
Please cite this article in English as:
Dukhopel'nikov D.V., Vorob'ev E.V., Ivakhnenko S.G., Kirillov D.V. Shape Control of the
Technological Ion Source Beam for High-Precision Surface Treatment.
Vestn. Mosk. Gos.
Tekh. Univ. im. N.E. Baumana, Estestv. Nauki
[Herald of the Bauman Moscow State Tech.
Univ., Nat. Sci.], 2017, no. 3, pp. 24–36. DOI: 10.18698/1812-3368-2017-3-24-36