Управление формой пучка технологического ионного источника для высокоточной обработки поверхности

Д.В. Духопельников, Е.В. Воробьев, С.Г. Ивахненко

ISSN 1812-3368. Вестник МГТУ им. Н.Э. Баумана. Сер. Естественные науки. 2017. № 3

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im. N.E. Baumana

[Science and Education: Scientific Publication of BMSTU], 2012, no. 10

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Nauka i obrazovanie: nauchnoe izdanie MGTU

im. N.E. Baumana

[Science and Education: Scientific Publication of BMSTU], 2015, no. 10

(in Russ.). DOI: 10.7463/1015.0818660

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Dukhopel'nikov D.V.

— Cand. Sc. (Eng.), Assoc. Professor of Plasma Power Facilities

Department, Bauman Moscow State Technical University (2-ya Baumanskaya ul. 5, str. 1,

Moscow, 105005 Russian Federation).

Vorob'ev E.V.

— assistant of Plasma Power Facilities Department, Bauman Moscow State

Technical University (2-ya Baumanskaya ul. 5, str. 1, Moscow, 105005 Russian Federation).

Ivakhnenko S.G.

— Cand. Sc. (Eng.), Assoc. Professor of Plasma Power Facilities Department,

Bauman Moscow State Technical University (2-ya Baumanskaya ul. 5, str. 1, Moscow, 105005

Russian Federation).

Kirillov D.V.

— assistant of Plasma Power Facilities Department, Bauman Moscow State

Technical University (2-ya Baumanskaya ul. 5, str. 1, Moscow, 105005 Russian Federation).

Please cite this article in English as:

Dukhopel'nikov D.V., Vorob'ev E.V., Ivakhnenko S.G., Kirillov D.V. Shape Control of the

Technological Ion Source Beam for High-Precision Surface Treatment.

Vestn. Mosk. Gos.

Tekh. Univ. im. N.E. Baumana, Estestv. Nauki

[Herald of the Bauman Moscow State Tech.

Univ., Nat. Sci.], 2017, no. 3, pp. 24–36. DOI: 10.18698/1812-3368-2017-3-24-36